The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Sep. 01, 2023
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Thomas Brezoczky, Los Gatos, CA (US);

Kirankumar Neelasandra Savandaiah, Bangalore, IN;

Srinivasan Manivannan, Tamilnadu, IN;

Arun Rengaraj, Nexus @ One-North, SG;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32715 (2013.01); H01L 21/68742 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/3321 (2013.01);
Abstract

A substrate support assembly includes a substrate support that is moveable between a raised position, a lowered position below the raised position, and an intermediate position between the raised and lowered positions. A lift pin is disposed in a hole through the substrate support, and is movable vertically with respect to the substrate support. In use, the substrate support assembly transitions between first and second configurations. In the first configuration, the substrate support and the lift pin are coupled such that the lift pin and the substrate support move simultaneously while the substrate support moves between the lowered position and the intermediate position. In the second configuration, the substrate support and the lift pin are decoupled such that the lift pin remains stationary while the substrate support moves between the intermediate position and the raised position.


Find Patent Forward Citations

Brezoczky, Thomas. (2026). Passive lift pin assembly (U.S. Patent No. 12548743). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12548743

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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