The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Feb. 25, 2022
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Yuanping Song, Newark, CA (US);
Johnny Pham, San Jose, CA (US);
Yiwei Song, Morgan Hill, CA (US);
Lin Xu, Fremont, CA (US);
Christopher Kimball, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B05D 1/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32477 (2013.01); B05D 1/02 (2013.01); H01J 37/32715 (2013.01); H01J 37/32807 (2013.01); B05D 2203/30 (2013.01); B05D 2506/10 (2013.01); H01J 2237/0213 (2013.01);
Abstract
A component in a semiconductor processing chamber is provided. An electrically conductive semiconductor or metal body has a CTE of less than 10.0×10/K. An intermediate layer is disposed over at least one surface of the body, the intermediate layer comprising a fluoropolymer. A perfluoroalkoxy alkane (PFA) layer is disposed over the intermediate layer to form the component.