The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Dec. 07, 2022
Nomura Micro Science Co., Ltd., Atsugi, JP;
Tohoku University, Sendai, JP;
Takayuki Jizaimaru, Atsugi, JP;
Takao Funakoshi, Atsugi, JP;
Yasuyuki Shirai, Sendai, JP;
Hisashi Fujimoto, Sendai, JP;
Takeshi Sakai, Sendai, JP;
NOMURA MICRO SCIENCE CO., LTD., Atsugi, JP;
TOHOKU UNIVERSITY, Sendai, JP;
Abstract
Provided is a stripping method capable of stripping a resist while suppressing the time and cost of processing required for stripping, while giving sufficient consideration to the load on the environment. The resist stripping method is a method for stripping a resist film-formed on a substrate, including: a pretreatment step of exposing the resist to a heated steam in a predetermined temperature range for a predetermined time; and a stripping step of stripping the resist exposed to the heated steam in the pretreatment step by using a resist stripping liquid, wherein the predetermined temperature range and the predetermined time are set according to the resist.