The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Jul. 12, 2023
Applicant:

Ii-vi Delaware, Inc., Wilmington, DE (US);

Inventor:

Young-Kai Chen, New Providence, NJ (US);

Assignee:

II-VI DELAWARE, INC., Wilmington, DE (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/134 (2006.01); G02B 6/12 (2006.01); G02F 1/025 (2006.01); G02F 1/225 (2006.01);
U.S. Cl.
CPC ...
G02B 6/1347 (2013.01); G02B 2006/121 (2013.01); G02B 2006/12142 (2013.01); G02B 2006/12173 (2013.01); G02F 1/025 (2013.01); G02F 1/2257 (2013.01);
Abstract

A method of forming a semiconductor device may include providing semiconductor substrate having a substrate top side and a dielectric layer along the substrate top side and forming a first mask layer over the dielectric layer. The method may include forming a lower cladding wall and an upper cladding wall via a first opening in the first mask layer. The method may also include forming a second mask layer over the dielectric layer and forming side cladding walls via second openings in the second mask layer. Various semiconductor devices having a buried waveguide in formed via the method are also disclosed.


Find Patent Forward Citations

Chen, Young-Kai. (2026). Planar buried optical waveguides in semiconductor substrate and methods of forming (U.S. Patent No. 12546941). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12546941

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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