The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Jun. 06, 2023
Applicant:

Denso Corporation, Kariya, JP;

Inventors:

Junichi Uehara, Kariya, JP;

Koji Eguchi, Kariya, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01N 21/84 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01N 21/9505 (2013.01); H01L 22/00 (2013.01); G01N 2021/8477 (2013.01);
Abstract

An inspection apparatus includes a light source that generates and emits light to a substrate to be inspected, a lens that captures the light emitted to and reflected by the substrate, a detection unit that detects the light captured by the lens, and a determination unit that calculates a reflectance of light of the substrate based on an intensity of the light generated by the light source and an intensity of the light detected by the detection unit, and performs an abnormality determination of the substrate based on the calculated reflectance.


Find Patent Forward Citations

Uehara, Junichi. (2026). Inspection apparatus and inspection method for semiconductor substrate (U.S. Patent No. 12546726). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12546726

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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