The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Apr. 05, 2022
Applicant:

Corporation for National Research Initiatives, Reston, VA (US);

Inventor:

Michael A. Huff, Oakton, VA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/18 (2006.01); G01L 1/22 (2006.01); G01L 1/26 (2006.01); H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
G01L 1/18 (2013.01); G01L 1/2293 (2013.01); G01L 1/26 (2013.01); H01L 21/302 (2013.01);
Abstract

A pressure and force sensor and method of fabrication for the implementation of the sensor is presented that employs piezoresistive elements having high gauge factors. Example embodiments allow for the implementation of a pressure or force sensing device and method of fabrication that can be tailored to the requirements of a wide range of applications without incurring long development times and high costs. The pressure or force sensor has an unprecedented level of sensitivity and can be used to measure extremely low levels of pressure and force, or alternatively to measure extremely high levels of pressure and forces. Moreover, the example embodiments teach pressure and force sensors suitable for use in harsh environments and can be operated at high temperatures.


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