The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Dec. 30, 2021
Applicant:

Commissariat À L'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;

Inventors:

Jean-Jacques Yon, Grenoble, FR;

Geoffroy Dumont, Grenoble, FR;

Thomas Perrillat-Bottonet, Grenoble, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/04 (2006.01); G01J 5/02 (2022.01); G01J 5/06 (2022.01); G01J 5/70 (2022.01);
U.S. Cl.
CPC ...
G01J 5/045 (2013.01); G01J 5/024 (2013.01); G01J 5/064 (2022.01); G01J 5/70 (2022.01);
Abstract

A method for manufacturing a detection device includes steps of: producing thermal detectors distributed in a detection array and a compensation array using mineral sacrificial layers; producing an encapsulation structure comprising a thin opaque layer extending above the compensation array; partially removing the mineral sacrificial layers by chemical etching, so as to release the detection array and the compensation array, and to obtain the peripheral wall then formed of a non-etched portion of the mineral sacrificial layers and surrounding the compensation array, the thin opaque layer then being suspended above the compensation array and resting on the peripheral wall.


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