The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
May. 23, 2024
Seiko Epson Corporation, Tokyo, JP;
Kohei Yamada, Shiojiri, JP;
Tetsuro Matsumoto, Chino, JP;
SEIKO EPSON CORPORATION, , JP;
Abstract
An interferometer including an analysis unit and a length measurement unit, wherein the analysis unit includes an analysis optical system that includes a first light source configured to emit an analysis light, a moving mirror that reflects the analysis light, and a first light receiving element that receives the analysis light, and is used for analysis of the sample using interference of the analysis light, and a mirror drive unit that drives the moving mirror based on a mirror drive signal, the length measurement unit includes a length measurement optical system that includes a laser source, a light modulator that adds a modulation component by modulating a frequency of the laser beam using a vibrating element, and a second light receiving element that receives the laser beam including the length measurement component and the modulation component generated when the moving mirror is irradiated with the laser beam, and outputs a second received light signal, and is used for detection of a position of the moving mirror using interference of the laser beam, and the vibrating element is a signal source of the mirror drive signal.