The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Nov. 16, 2022
Applicant:

Nanoclear Technologies, Inc., Pasadena, CA (US);

Inventors:

Harold Frank Greer, Los Angeles, CA (US);

Rehan Kapadia, Los Angeles, CA (US);

Assignee:

NanoClear Technologies, Inc., Pasadena, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/12 (2006.01);
U.S. Cl.
CPC ...
C23F 1/12 (2013.01);
Abstract

Methods described herein allow for a smoothing of a particular material on a substrate independently of smoothing a different material on the substrate. Both materials may be exposed to the same reactant but form different skins (e.g., reactive layers). One skin may allow for smoothing of one material, while the other skin may protect or preserve the underlying material. Removing one of the skins may result in a smoother underlying material. The skins may be formed by a dry process and removed by a wet process, or the skins may be formed by a wet process and removed by a dry process. The change of the reaction medium between wet and dry for reaction and removal may allow for highly selective chemistries to result in smoothing one material while not affecting the underlying substrate or other materials at the surface. Substrates produced by these methods are described herein.


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