The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 10, 2026

Filed:

Aug. 16, 2022
Applicant:

Raytheon Technologies Corporation, Farmington, CT (US);

Inventors:

Jun Nable, Hamden, CT (US);

Ying She, Rocky Hill, CT (US);

Olivier H. Sudre, Glastonbury, CT (US);

Assignee:

RTX Corporation, Farmington, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 14/24 (2006.01); C23C 16/34 (2006.01);
U.S. Cl.
CPC ...
C23C 16/448 (2013.01); C23C 14/243 (2013.01); C23C 16/34 (2013.01); C23C 16/4481 (2013.01); C23C 14/246 (2013.01);
Abstract

A chemical vapor deposition system comprises a reactor including at least one wall extending between an inlet end and an outlet end, and an internal volume defined by the at least one wall, the inlet end, and the outlet end. The reactor further comprises a heat source in thermal communication with the internal volume, and a solid precursor container removably placed within the internal volume. The solid precursor container includes at least one internal cavity for holding an amount of the solid precursor, and an opening fluidly connecting the at least one internal cavity to the internal volume of the reactor. The solid precursor comprises at least one of aluminum, zirconium, hafnium, and a rare earth metallic element.


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