The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2026
Filed:
Mar. 16, 2023
Applicant:
Zeus Co., Ltd., Hwaseong-si, KR;
Inventors:
Sanghoon Lee, Suwon-si, KR;
Jiho Park, Hwaseong-si, KR;
Woon Kong, Cheonan-si, KR;
Ungjo Moon, Osan-si, KR;
Assignee:
ZEUS CO., LTD., Hwaseong-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 (2006.01); H01L 21/67 (2006.01); B06B 1/02 (2006.01);
U.S. Cl.
CPC ...
B08B 3/123 (2013.01); H01L 21/6704 (2013.01); B06B 1/02 (2013.01);
Abstract
A wafer cleaning apparatus according to the present disclosure includes a rotary table that supports and rotates a wafer so that the wafer rotates about a rotational axis, and an ultrasonic vibration device that vibrates a liquid film so that vibration having an ultrasonic frequency is generated in the liquid film formed on an upper surface of the wafer.
Lee, Sanghoon. (2026). Wafer cleaning apparatus (U.S. Patent No. 12544806). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12544806
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile