The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2026
Filed:
Nov. 21, 2024
Applicant:
Toto Ltd., Fukuoka, JP;
Inventors:
Kouta Kobayashi, Fukuoka, JP;
Yutaka Momiyama, Fukuoka, JP;
Masafumi Ikeguchi, Fukuoka, JP;
Jumpei Uefuji, Fukuoka, JP;
Assignee:
TOTO LTD., Fukuoka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01);
Abstract
An electrostatic chuckincludes a dielectric substrate, a base platewhich supports the dielectric substrate, and a joining layerwhich joins the dielectric substrateand the base plate. A value of a dielectric tangent of the joining layerwhen a temperature of the joining layeris 20° C. is set as a reference value. In the electrostatic chuck, when the temperature of the joining layerhas changed from 20° C. to −60° C., a range in which the value of the dielectric tangent of the joining layerfluctuates falls within a range from 50% to 200% of the reference value.