The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2026
Filed:
Dec. 29, 2021
Shanghai Integrated Circuit Manufacturing Innovation Center Co., Ltd, Shanghai, CN;
Abstract
An on-chip all-solid-state supercapacitor includes first electrode and second electrode, each including substrate, laminated structure, conductive thin film layer and solid electrolyte. Laminated structure is disposed on surface of substrate and has at least one deep trench structure; inner surface of deep trench structure has sacrificial layer trench to increase electrode area of on-chip all-solid-state supercapacitor capacitance density and energy density; conductive thin film layer covers inner surface of deep trench structure, inner surface of sacrificial layer trench, surface of substrate exposed in deep trench structure and surface of laminated structure facing away from substrate; solid electrolyte is filled inside sacrificial layer trench and deep trench structure covered by conductive thin film layer; solid electrolyte also covers surface of conductive thin film layer facing away from substrate, solid electrolyte of first electrode and solid electrolyte of second electrode are bonded together. A preparation method thereof is also provided.