Semiconductor memory device including a charge storage layer

Abstract

A semiconductor memory device includes a first substrate defining a cell array region, a mold structure including a plurality of gate electrodes sequentially spaced and stacked on the first substrate in a step form, and a channel hole defined as penetrating the plurality of gate electrodes on the cell array region in a vertical direction perpendicular to an upper surface of the first substrate. The device includes an information storage layer along side walls and a bottom surface of the channel hole, the information storage layer including a blocking insulation layer along the side walls and the bottom surface of the channel hole, a charge storage layer on the blocking insulation layer, and a tunneling insulation layer. The device includes a channel layer on the information storage layer inside the channel hole, and an insulation pattern arranged to fill the channel hole on the channel layer.