The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 03, 2026

Filed:

Jul. 19, 2022
Applicant:

Koninklijke Philips N.v., Eindhoven, NL;

Inventors:
Assignee:

Koninklijke Philips N.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 33/42 (2006.01); B29C 43/02 (2006.01); B29C 43/58 (2006.01); B29C 59/00 (2006.01); B29C 59/02 (2006.01); B29K 105/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 33/424 (2013.01); B29C 43/021 (2013.01); B29C 43/58 (2013.01); B29C 59/002 (2013.01); B29C 59/02 (2013.01); G03F 7/707 (2013.01); G03F 7/70733 (2013.01); G03F 7/70758 (2013.01); G03F 7/70775 (2013.01); G03F 7/70783 (2013.01); G03F 7/70875 (2013.01); B29C 2033/426 (2013.01); B29C 2043/025 (2013.01); B29K 2105/0061 (2013.01);
Abstract

An imprinting apparatus comprises a first carrier for carrying a flexible stamp having an imprinting pattern and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and an interface plate over the chuck, wherein the interface plate comprises an array of openings for receiving already-imprinted areas of one side of a substrate while an opposite side of the substrate is to be imprinted. The chuck comprises a fluid passage arrangement for coupling to the openings of the array.


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