The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2026
Filed:
Mar. 02, 2022
Edwards Limited, Burgess Hill, GB;
Andrew James Seeley, Clevedon, GB;
Abstract
A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multiple modular cooling assemblies may be incorporated into the abatement apparatus, each of which provides cooling capacity. The number of modular cooling assemblies can be selected to suit the cooling requirement of the abatement apparatus.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile