The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 27, 2026

Filed:

Sep. 29, 2021
Applicant:

Resonac Corporation, Tokyo, JP;

Inventors:

Yasuyuki Oyama, Tokyo, JP;

Emi Miyazawa, Tokyo, JP;

Yuta Akasu, Tokyo, JP;

Ryoji Furutani, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B32B 7/06 (2019.01); C09J 7/10 (2018.01); C09J 7/38 (2018.01); C09J 7/40 (2018.01); H01L 21/56 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); B32B 7/06 (2013.01); C09J 7/10 (2018.01); C09J 7/387 (2018.01); C09J 7/405 (2018.01); H01L 21/568 (2013.01); C09J 2453/00 (2013.01); C09J 2467/005 (2013.01); H01L 2221/68386 (2013.01);
Abstract

A method for manufacturing a semiconductor device, the method including irradiating a laminated body for temporary fixing with light and thereby separating the semiconductor member from a resin layer for temporary fixing. The laminated body for temporary fixing is formed by a method including: laminating a film material for temporary fixing on a light-absorbing layer in a direction in which a first principal surface is in contact with the light-absorbing layer; and peeling off a second release film from the film material for temporary fixing to expose a second principal surface. When the maximum values of logarithmic decrements of the first principal surface and the second principal surface of the resin layer for temporary fixing in rigid pendulum measurement are designated as δ1 and δ2, respectively, δ2 is smaller than δ1.


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