The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2026
Filed:
Dec. 13, 2023
Applicant:
Mico Ceramics Ltd., Anseong-si, KR;
Inventors:
Assignee:
MICO CERAMICS LTD., Anseong-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B28B 11/24 (2006.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01); H05B 6/62 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); B28B 11/243 (2013.01); C23C 14/50 (2013.01); C23C 16/4586 (2013.01); H05B 6/62 (2013.01); H05B 2203/017 (2013.01);
Abstract
The present invention relates to an electrostatic chuck heater having a bipolar structure, the electrostatic chuck heater comprising: a heater body having an internal electrode and an external electrode for selectively performing any one of an RF grounding function and an electrostatic chuck function according to a semiconductor process mode; and a heater support mounted below the heater body so as to support the heater body.