The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 27, 2026

Filed:

Aug. 30, 2023
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Tetsuya Kimura, Nagaokakyo, JP;

Shintaro Kubo, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/56 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02015 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/564 (2013.01);
Abstract

An acoustic wave device includes a support including a support substrate, a piezoelectric layer on the support, and an excitation electrode on the piezoelectric layer. A cavity portion is provided in the support and overlaps at least a portion of the excitation electrode. A portion of the piezoelectric layer that overlaps the cavity portion is a membrane portion. The membrane portion includes first and second directions orthogonal or substantially orthogonal to each other. The membrane portion includes a central portion in the center in the first direction, first and second portions facing each other across the central portion in the first direction, and an outer peripheral edge. At least a portion of the outer peripheral edge of the first and second portions of the membrane portion is located in an outer side portion in the second direction relative to the outer peripheral edge in the central portion.


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