The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2026
Filed:
Nov. 04, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Ala Moradian, San Jose, CA (US);
Aleksey Yanovich, Campbell, CA (US);
Orlando Trejo, Santa Clara, CA (US);
Elizabeth Neville, Sunnyvale, CA (US);
Dinesh Saigal, San Jose, CA (US);
Umesh Madhav Kelkar, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In embodiments, a method includes receiving, by a processing device, first sensor data generated by a plurality of sensors of a process chamber of a manufacturing system during execution of a fabrication process. The method includes receiving, by the processing device, second sensor data generated by one or more external sensors that are not components of the process chamber during execution of the fabrication process. The method includes determining, by the processing device, environmental resource usage data indicative of an environmental resource consumption of the fabrication process run on the process chamber based on the first sensor data and the second sensor data. The method includes providing, by the processing device, the environmental resource usage data for display on a graphical user interface (GUI).