The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2026
Filed:
Apr. 29, 2022
Technische Universität Dortmund, Dortmund, DE;
Stefan Palzer, Dortmund, DE;
TECHNISCHE UNIVERSITÄT DORTMUND, Dortmund, DE;
Abstract
A method for producing a photoacoustic gas sensor for a target gas, having the steps of a) providing a wafer made of silicon, having a front face and a rear face. The wafer having a buried insulating layer within the silicon. The method including b) providing a suspended thermal emitter having a first cavity on the rear face of the wafer. The method including c) providing a sound-sensitive element on the front face of the wafer, the sound-sensitive element having a second cavity in which the target gas is enclosed. The additionally relates to a photoacoustic gas sensor for a target gas.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile