The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 27, 2026

Filed:

Oct. 21, 2020
Applicant:

Flusso Limited, Cambridgeshire, GB;

Inventors:

Florin Udrea, Cambridgeshire, GB;

Andrea De Luca, Cambridgeshire, GB;

Claudio Falco, Cambridgeshire, GB;

Syed Zeeshan Ali, Cambridgeshire, GB;

Ethan Gardner, Warwickshire, GB;

Assignee:

Flusso Limited, Cambridgeshire, GB;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/688 (2006.01); G01F 1/684 (2006.01); G01F 1/69 (2006.01); G01F 1/7084 (2022.01); G01F 15/02 (2006.01); G01N 25/18 (2006.01); G01N 27/04 (2006.01); G01N 27/14 (2006.01); G01N 27/18 (2006.01); G01N 33/00 (2006.01); G01F 1/698 (2006.01);
U.S. Cl.
CPC ...
G01F 1/6888 (2013.01); G01F 1/69 (2013.01); G01F 1/7084 (2013.01); G01N 25/18 (2013.01); G01N 27/04 (2013.01); G01N 27/14 (2013.01); G01N 27/18 (2013.01); G01N 33/0027 (2013.01); G01F 1/698 (2013.01); G01F 15/022 (2013.01);
Abstract

We disclose herein a flow and thermal conductivity sensor comprising a semiconductor substrate comprising an etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the semiconductor substrate and a heating element located within the dielectric membrane. The dielectric membrane comprises one or more discontinuities located between the heating element and an edge of the dielectric membrane.


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