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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12534360 B1

PDFFull Text
Date of Patent:
Jan. 27, 2026

Filed:

Jun. 02, 2020

Generating a mems device with glass cover and mems device

Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Andre Brockmeier, Villach, AT;

Rafael Janski, Villach, AT;

Boris Kirillov, Judendorf-Straßenge, AT;

Marten Oldsen, Anzing, DE;

Clemens Roessler, Villach, AT;

Francisco Javier Santos Rodriguez, Villach, AT;

Sokratis Sgouridis, Annenheim, AT;

Kurt Sorschag, Villach, AT;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:

Harrity & Harrity, LLP

Primary Examiner:

Christine S Kim

Assistant Examiner:

Tyler J Wiegand

Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 7/00 (2006.01); G01S 7/481 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00269 (2013.01); B81B 7/0067 (2013.01); G01S 7/4817 (2013.01); G02B 26/0833 (2013.01); B81B 2201/042 (2013.01); B81B 2201/047 (2013.01); B81C 2201/036 (2013.01); B81C 2203/0118 (2013.01); B81C 2203/037 (2013.01);
Abstract

In a method of generating a microelectromechanical system, MEMS, device, a MEMS substrate including a movable element is provided. A glass cover member including a glass cover is formed by hot embossing. The glass cover member is bonded to the MEMS substrate so as to hermetically seal by the glass cover a cavity in which the movable element is arranged.

Find Patent Forward Citations

Brockmeier, Andre. (2026). Generating a mems device with glass cover and mems device (U.S. Patent No. 12534360). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12534360

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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