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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12532705 B1

PDFFull Text
Date of Patent:
Jan. 20, 2026

Filed:

Jan. 11, 2022

Substrate fixing device

Applicant:

Shinko Electric Industries Co., Ltd., Nagano, JP;

Inventors:

Keita Sato, Nagano, JP;

Hiroharu Yanagisawa, Nagano, JP;

Yohei Yamada, Nagano, JP;

Yuichi Nakamura, Nagano, JP;

Nobuyuki Iijima, Nagano, JP;

Assignee:

SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano, JP;

Attorney:

Rankin, Hill & Clark LLP

Primary Examiner:

Vivian Chen

Int. Cl.
CPC ...
H01L 21/683 (2006.01); B32B 7/02 (2019.01); B32B 7/027 (2019.01); B32B 7/12 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); H01L 21/68785 (2013.01); B32B 7/02 (2013.01); B32B 7/027 (2019.01); B32B 7/12 (2013.01); H01L 21/683 (2013.01);
Abstract

A substrate fixing device includes: a base plate; an electrostatic adsorption member that adsorbs and holds a substrate; and a first adhesive layer that adhesively bonds the electrostatic adsorption member to the base plate. A storage modulus of the first adhesive layer is not less than 0.01 MPa and not more than 25 MPa within a temperature range of −110° C. to 250° C.

Find Patent Forward Citations

Sato, Keita. (2026). Substrate fixing device (U.S. Patent No. 12532705). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12532705

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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