The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2026
Filed:
Jun. 13, 2025
Service Support Specialties, Inc., Montville, NJ (US);
Gary Hillman, Livingston, NJ (US);
Rodrigo Nogueira, New York, NY (US);
Abstract
A system for detecting the presence of a wafer on a wafer handling robot. The system includes a robot having an end effector with a ledge portion having an opening; a vacuum pump; a conduit fluidly coupling the vacuum pump to the opening in the ledge portion; a pressure sensor located along the conduit to determine whether a measured pressure is within a target pressure range; and a wafer configured to be supported by the at least one end effector and spaced apart from the ledge portion by an air gap. When the wafer is supported by the at least one end effector in a proper position, the measured pressure is within the target pressure range. When the wafer is not supported by the wafer support structure or is supported by the wafer support structure in an improper position, the measured pressure is outside of the target pressure range.