The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 20, 2026

Filed:

Apr. 29, 2022
Applicant:

Rockley Photonics Limited, Altrincham, GB;

Inventors:

Guomin Yu, Glendora, CA (US);

Mohamad Dernaika, Cork, IE;

Ludovic Caro, Cork, IE;

Hua Yang, Cork, IE;

Aaron John Zilkie, Pasadena, CA (US);

Assignee:

Rockley Photonics Limited, Altrincham, GB;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10H 20/01 (2025.01); H01L 21/683 (2006.01); H01L 21/78 (2006.01); H10F 71/00 (2025.01);
U.S. Cl.
CPC ...
H10H 20/018 (2025.01); H10F 71/127 (2025.01); H01L 21/683 (2013.01); H01L 21/6835 (2013.01); H01L 21/7806 (2013.01); H01L 2221/68354 (2013.01); H01L 2221/68368 (2013.01);
Abstract

A method of preparing a device coupon for a micro-transfer printing process from a multi-layered stack located on a device wafer substrate. The multi-layered stack comprises a plurality of semiconductor layers. The method comprises steps of: (a) etching the multi-layered stack to form a multi-layered device coupon, including an optical component; and (b) etching a semiconductor layer of the multi-layered device coupon to form one or more tethers, said tethers securing the multi-layered device coupon to one or more supports.


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