The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2026
Filed:
Jan. 20, 2023
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventors:
Tatsuya Kuno, Nagoya, JP;
Seiya Inoue, Handa, JP;
Assignee:
NGK INSULATORS, LTD., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B32B 3/26 (2006.01); B32B 7/12 (2006.01); B32B 18/00 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); B32B 3/266 (2013.01); B32B 7/12 (2013.01); B32B 18/00 (2013.01); H01J 2237/002 (2013.01);
Abstract
In a wafer placement table, a cooling plate having a refrigerant flow channel is provided on a bottom surface side of a ceramic plate incorporating an electrode. A gas intermediate passage that is a horizontal space is provided parallel to a wafer placement surface at a location closer to the wafer placement surface than the refrigerant flow channel in the wafer placement table and has an overlapping part that overlaps the refrigerant flow channel along the refrigerant flow channel in plan view.