The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 20, 2026

Filed:

Aug. 22, 2022
Applicant:

Solmics Co., Ltd., Pyeongtaek-si, KR;

Inventors:

Sung Sic Hwang, Seoul, KR;

Jae Bum Lee, Pyeongtaek-si, KR;

Jun Rok Oh, Seoul, KR;

Kyoung Yeol Min, Yongin-si, KR;

Kyung In Kim, Hwaseong-si, KR;

Jung Kun Kang, Pyeongtaek-si, KR;

Assignee:

Solmics Co., Ltd., Pyeongtaek-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32642 (2013.01); H01J 37/244 (2013.01); H01J 37/3255 (2013.01);
Abstract

A manufacturing method of a ring-shaped element for an etcher, comprises a granulation operation comprising i) a slurry manufacturing process of preparing a slurry by mixing a raw material including boron carbide, a sinterability enhancer with a solvent; and ii) a granulation process of drying the slurry to prepare granulated raw material; a molding operation of manufacturing a green body by molding the granulated raw material; a sintering operation of carbonizing and sintering the green body to manufacture a sintered body; a shape operation of shaping the sintered body to a ring-shaped element for an etcher. The sinterability enhancer comprises one selected from the group consisting of carbon, boron oxide and combinations thereof.


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