The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 20, 2026

Filed:

Aug. 11, 2023
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Pekka Lehtinen, Vantaa, FI;

Akira Konno, Helsinki, FI;

Matti Liukku, Helsinki, FI;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/001 (2013.01); B81B 3/0051 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); B81B 2203/056 (2013.01);
Abstract

A microelectromechanical element is provided that includes a first device part and a second device part, and a motion-limiting structure having a first stopper bump and a second stopper bump. The first and second stopper bumps extend from the first device part toward the second device part. When one of the device parts moves toward the other device part in the out-of-plane direction and crosses a displacement threshold, the first stopper bump comes into contact with the second device part before the second stopper bump contacts the second device part, and the second stopper bump comes into contact with the second device part before the first device part contacts with the second device part.


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