The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Jun. 30, 2022
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Udit Rawat, West Lafayette, IN (US);
Bichoy Bahr, Alle, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02448 (2013.01); H03H 9/2405 (2013.01);
Abstract
A microelectromechanical systems (MEMS) resonator includes a substrate, an array of ferroelectric capacitors on the substrate, and a three-dimensional metal stack above the array of ferroelectric capacitors. The three-dimensional metal stack may include more than two metal layers. Each of the metal layers is coupled to another of the metal layers by more than two metal vias.