The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2026

Filed:

Jun. 22, 2022
Applicant:

Kokusai Electric Semiconductor Service Inc., Toyama, JP;

Inventor:

Chihiro Tetsuyama, Toyama, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); H01L 21/67253 (2013.01); H01L 21/67276 (2013.01);
Abstract

There is provided a technique that includes (a) receiving a recipe for measuring an object to be measured; (b) calculating an estimated time when measuring the object according to a setting order of respective measurement points set in the recipe; (c) changing the setting order of the respective measurement points set in the recipe according to a measurement pattern for measuring the object and calculating an estimated time when measuring the object according to the changed setting order; (d) selecting the setting order in which the estimated time is the shortest among the estimated times calculated in (b) and (c); and (e) measuring the object in the selected setting order.


Find Patent Forward Citations

Tetsuyama, Chihiro. (2026). Method of measuring resistivity, method of manufacturing semiconductor device, recording medium, and resistivity measuring device (U.S. Patent No. 12525491). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12525491

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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