The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Oct. 07, 2022
Applicant:
Google Llc, Mountain View, CA (US);
Inventors:
Brian James Burkett, Santa Barbara, CA (US);
John Mark Kreikebaum, Santa Barbara, CA (US);
Assignee:
Google LLC, Mountain View, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/308 (2006.01); H01L 21/02 (2006.01); H01L 21/033 (2006.01); H01L 21/3205 (2006.01); H01L 21/324 (2006.01); H10N 60/01 (2023.01);
U.S. Cl.
CPC ...
H01L 21/3086 (2013.01); H01L 21/0206 (2013.01); H01L 21/0334 (2013.01); H01L 21/0337 (2013.01); H01L 21/3081 (2013.01); H01L 21/32051 (2013.01); H01L 21/324 (2013.01); H01L 21/0331 (2013.01); H10N 60/0912 (2023.02);
Abstract
A substrate, a first layer disposed on the substrate, and a second layer disposed on the first layer are provided. An opening is etched through the second layer to the first layer. A first portion of the first layer is etched through the opening using a first etchant, to expose a surface of the substrate through the opening. A feature is deposited on the surface of the substrate through the opening. A second portion of the first layer is etched using a gaseous etchant, to release the substrate from the second layer.