The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2026

Filed:

Jul. 29, 2022
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Andrew Nelson, Van Alstyne, TX (US);

John C. Ehmke, Longview, TX (US);

Daryl R. Koehl, Garland, TX (US);

Nathan Bays, Rowlett, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H10D 84/01 (2025.01);
U.S. Cl.
CPC ...
H01L 21/02087 (2013.01); H01L 21/02008 (2013.01); H10D 84/01 (2025.01);
Abstract

In some examples, a device comprises a wafer chuck, a member having a surface facing the wafer chuck, a blade supported by the surface, a first vacuum nozzle extending through the member and having a first vacuum orifice facing a same direction as the surface, and a second vacuum nozzle extending through the member and having a second vacuum orifice facing the same direction as the surface. The first and second vacuum orifices are on opposing sides of the blade.


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