The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2026

Filed:

Feb. 28, 2022
Applicants:

Tohoku University, Miyagi, JP;

Fujikin Incorporated, Osaka, JP;

Inventor:

Shigetoshi Sugawa, Miyagi, JP;

Assignees:

TOHOKU UNIVERSITY, Miyagi, JP;

FUJIKIN INCORPORATED, Osaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0072 (2013.01);
Abstract

An electrostatic capacitive pressure sensor including a reference chamber provided between a fixed electrode and a movable electrode that deflects in accordance with fluid pressure, a measurement chamber filled with a fluid for causing deflection of the movable electrode, a means for sequentially applying a first potential and a second potential to the fixed electrode and generating a first output signal corresponding to the first potential and a second output signal corresponding to the second potential, and a means for generating a difference signal between the first output signal and the second output signal.


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