The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Jun. 24, 2022
Applicant:
Up Chemical Co., Ltd., Pyeongtaek-si, KR;
Inventors:
Jin Sik Kim, Pyeongtaek-si, KR;
Myeong-Ho Park, Suwon-si, KR;
Dong Hwan MA, Seoul, KR;
Yun Gyeong Yi, Guri-si, KR;
Jun Hwan Choi, Goyang-si, KR;
Assignee:
UP CHEMICAL CO., LTD., Pyeongtaek-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/04 (2006.01); C23C 16/32 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/045 (2013.01); C23C 16/32 (2013.01); C23C 16/34 (2013.01); C23C 16/405 (2013.01);
Abstract
The present disclosure relates to an yttrium/lanthanide metal precursor compound, a precursor composition for depositing an yttrium/lanthanide metal-containing film including the yttrium/lanthanide metal precursor compound, and a method of depositing the yttrium/lanthanide metal-containing film using the precursor composition.