The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2026

Filed:

Sep. 09, 2020
Applicant:

Shibaura Machine Co., Ltd., Chiyoda-ku, JP;

Inventors:

Yoshiaki Kurihara, Sunto-gun, JP;

Takeshi Namba, Sunto-gun, JP;

Satoshi Fukuyama, Numazu, JP;

Koichi Nose, Osaka, JP;

Assignee:

Shibaura Machine Co., Ltd., Chiyoda-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/54 (2013.01); C23C 14/3492 (2013.01);
Abstract

A flow rate adjustment valve includes: a flow path portion which has one end at which an opening is formed, and in which a fluid flows; a lifting valve which is configured to close the opening by covering an entire region of the opening, open the opening by being separated from the opening in an opening direction of the opening, and change a distance from the opening in the opening direction to change a flow area with respect to the opening; and a servo actuator as a driver which moves the lifting valve in the opening direction based on a predetermined detection value.


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