The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Jun. 26, 2020
Applicant:
Furuya Metal Co., Ltd., Tokyo, JP;
Inventors:
Tomohiro Maruko, Tokyo, JP;
Yu Suzuki, Tokyo, JP;
Shohei Otomo, Tokyo, JP;
Hironobu Nakamura, Tokyo, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); B22F 3/105 (2006.01); B22F 3/24 (2006.01); B22F 9/08 (2006.01); C22C 1/04 (2023.01); C22C 1/047 (2023.01); C22C 1/05 (2023.01); C22C 21/00 (2006.01); C22C 29/00 (2006.01); C22C 29/16 (2006.01); C22C 32/00 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); B22F 3/105 (2013.01); B22F 3/24 (2013.01); B22F 9/082 (2013.01); C22C 1/0416 (2013.01); C22C 1/047 (2023.01); C22C 1/05 (2013.01); C22C 21/00 (2013.01); C22C 29/005 (2013.01); C22C 29/16 (2013.01); C22C 32/0068 (2013.01); H01J 37/3429 (2013.01); B22F 2003/1051 (2013.01); B22F 2003/247 (2013.01); B22F 2009/0824 (2013.01); B22F 2201/20 (2013.01); B22F 2202/13 (2013.01); B22F 2301/052 (2013.01); B22F 2302/20 (2013.01); B22F 2998/10 (2013.01); B22F 2999/00 (2013.01);
Abstract
The sputtering target of the present disclosure includes: an aluminum matrix; and (1) a material or phase containing aluminum and further containing either a rare earth element or a titanium group element or both a rare earth element and a titanium group element or (2) a material or phase containing either a rare earth element or a titanium group element or both a rare earth element and a titanium group element, at a content of 10 to 70 mol % in the aluminum matrix.