The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 13, 2026

Filed:

Apr. 12, 2022
Applicant:

Technische Universität Wien, Vienna, AT;

Inventors:

Daniel Platz, Vienna, AT;

Ulrich Schmid, Vienna, AT;

Jonas Hafner, Vienna, AT;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); G01C 19/5712 (2012.01); G01Q 60/24 (2010.01); H10N 30/30 (2023.01);
U.S. Cl.
CPC ...
B81B 3/0081 (2013.01); G01C 19/5712 (2013.01); G01Q 60/24 (2013.01); H10N 30/302 (2023.02); H10N 30/304 (2023.02); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); B81B 2201/0285 (2013.01);
Abstract

A micro-electromechanical system () comprising: a sensor device (), with a measuring deformer () exhibiting an effective temperature T; a high-frequency resonator () that is mechanically coupled to the sensor device () and can interact with the measuring deformer (); an energy converter () that is operatively connected to the high-frequency resonator () and is configured to excite the high-frequency resonator () into a vibration state, wherein, through the interaction of the vibrating high-frequency resonator () with the measuring deformer (), energy can be transferred from the measuring deformer () to the high-frequency resonator () in such a manner that the measuring deformer () after the energy transfer exhibits an effective temperature Tlower than T


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