The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Jan. 26, 2024
Device Co., Ltd., Chungcheongnam-do, KR;
Taek Youb Lee, Cheonan-si, KR;
Hee Won Lee, Cheonan-si, KR;
DEVICE CO., LTD., Chungcheongnam-do, KR;
Abstract
The present disclosure relates to a substrate treatment apparatus having a heating part, including: a chuck base disposed rotatable around a rotational axis and having a ring-shaped spin chuck with chuck pins to support a substrate and a chuck support part located on lower portion of the inner peripheral surface of the spin chuck; a back nozzle assembly mounted at the center of the chuck base; cover glass disposed between top of the spin chuck and the back nozzle assembly; and a heating part disposed between the cover glass and the chuck support part, wherein slant refracting surface is formed on a central portion of the cover glass and slants upward in a radial direction with respect to the rotational axis.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile