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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12521771 B1

PDFFull Text
Date of Patent:
Jan. 13, 2026

Filed:

Nov. 23, 2022

Liquid supply unit, and substrate treating apparatus including the same

Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventors:

Jun Ho Song, Hwaseong-si, KR;

Min Hee Cho, Suwon-si, KR;

Won Young Kang, Hwaseong-si, KR;

Assignee:

SEMES CO., LTD., Chungcheongnam-Do, KR;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

Michael E Barr

Assistant Examiner:

Thomas undefined Bucci

Int. Cl.
CPC ...
B08B 3/10 (2006.01); B08B 3/02 (2006.01); B08B 3/04 (2006.01); B08B 3/08 (2006.01); B08B 13/00 (2006.01); F24H 1/12 (2022.01); H01L 21/67 (2006.01); H05B 3/12 (2006.01); H05B 3/14 (2006.01); H05B 3/48 (2006.01);
U.S. Cl.
CPC ...
B08B 3/10 (2013.01); B08B 3/022 (2013.01); B08B 3/041 (2013.01); B08B 3/08 (2013.01); B08B 13/00 (2013.01); F24H 1/122 (2013.01); H05B 3/48 (2013.01); B08B 2203/007 (2013.01); H01L 21/67051 (2013.01); H05B 3/12 (2013.01); H05B 3/145 (2013.01); H05B 2203/013 (2013.01); H05B 2203/016 (2013.01); H05B 2203/021 (2013.01);
Abstract

Provided is a liquid supply unit for supplying a treatment liquid to a nozzle that discharges the treatment liquid to a substrate, the liquid supply unit including: a tank for storing the treatment liquid; a main circulation line for supplying the treatment liquid from an internal space of the tank to the nozzle or for recovering the treatment liquid to the internal space of the tank; a supply line connected to the main circulation line to supply the treatment liquid to the nozzle; and a heater module installed in the main circulation line and heating the treatment liquid flowing through the main circulation line to a predetermined temperature, in which the heater module includes: a pipe in which the treatment liquid flows and which is made of a quartz material; and a heating element provided on a surface of the pipe.

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