The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Dec. 21, 2022
National Kaohsiung University of Science and Technology, Kaohsiung, TW;
Cheng-Ta Yang, Kaohsiung, TW;
National Kaohsiung University of Science and Technology, Kaohsiung, TW;
Abstract
A micro-electromechanical system (MEMS) acoustic sensor includes: a silicon substrate layer; an insulation layer, arranged above the silicon substrate layer; two first electrode layers, respectively arranged above the insulation layer and arranged opposite to each other at intervals; and two second electrode layers, respectively arranged above the two first electrode layers. Each of the second electrode layers is provided with at least one support member connected to the corresponding first electrode layer, and forms an acoustic flow channel together with a part of the insulation layer and the two first electrode layers. The each second electrode layer has a front section and a rear section. The front section forms a diverging first cambered surface. The rear section forms a tapered second cambered surface.