The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Sep. 25, 2023
Gudeng Precision Industrial Co., Ltd., New Taipei, TW;
Ming-Chien Chiu, New Taipei, TW;
Chia-Ho Chuang, New Taipei, TW;
Kuo-Hua Lee, New Taipei, TW;
Xin-Yuan Huang, New Taipei, TW;
En-Nien Shen, New Taipei, TW;
Jyun-Ming Lyu, New Taipei, TW;
GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei, TW;
Abstract
The present invention provides a measuring apparatus for measuring a wafer carrier having an opening end and at least one gas tower deposited inside, the measuring apparatus comprising a carrying interface for securing the wafer carrier. The opening end of the wafer carrier faces an inspection space of measuring apparatus. The carrying interface having a gas supplying assembly connected to a base of the wafer carrier so as to supply gas to the wafer carrier. The internal of the inspection space disposed a measuring assembly which is mainly used to measure gas flow rate from the gas tower in the accommodating space. The measuring assembly comprises a plurality of wind speed sensing elements and a plurality of displacement sensing element, which are fitted to the a second connecting element.