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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12518783 B1

PDFFull Text
Date of Patent:
Jan. 06, 2026

Filed:

Feb. 24, 2022

Thin-film piezoelectric material element

Applicant:

Sae Magnetics (H.k.) Ltd., Hong Kong, CN;

Inventors:

Wei Xiong, Hong Kong, CN;

Atsushi Iijima, Hong Kong, CN;

Assignee:

SAE MAGNETICS (H.K.) LTD., Hong Kong, CN;

Attorney:

Nixon & Vanderhye, P.C.

Primary Examiner:

Derek J Rosenau

Int. Cl.
CPC ...
H01L 41/053 (2006.01); C23C 14/02 (2006.01); C23C 14/08 (2006.01); C30B 23/02 (2006.01); C30B 29/32 (2006.01); G11B 5/48 (2006.01); H10N 30/00 (2023.01); H10N 30/06 (2023.01); H10N 30/076 (2023.01); H10N 30/079 (2023.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01); B41J 2/14 (2006.01);
U.S. Cl.
CPC ...
G11B 5/4873 (2013.01); C23C 14/025 (2013.01); C23C 14/088 (2013.01); C30B 23/02 (2013.01); C30B 29/32 (2013.01); H10N 30/06 (2023.02); H10N 30/076 (2023.02); H10N 30/079 (2023.02); H10N 30/708 (2024.05); H10N 30/8554 (2023.02); H10N 30/877 (2023.02); B41J 2002/14266 (2013.01);
Abstract

A thin-film piezoelectric material elements are arranged on a thin-film piezoelectric material substrate. The thin-film piezoelectric material substrate includes an insulator on Si substrate including a substrate including silicon and an insulating layer on a surface of the substrate. The thin-film piezoelectric material element includes a thin-film laminated part on a top surface of the insulating layer. The thin-film laminated part includes a YZ seed layer including yttrium and zirconium, and formed on the top surface; a lower electrode film laminated on the YZ seed layer; a piezoelectric material film including lead zirconate titanate, shown by a formula Pb (ZrTi) O(0≤x≤1), and an upper electrode film laminated on the piezoelectric material film. The thin-film laminated part further includes an upper piezoelectric-material protective-film, laminated on the upper side of the upper electrode film.

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