The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Jan. 06, 2023
Samsung Electronics Co., Ltd., Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul, KR;
Abstract
In a method of classifying defects of a pattern, SEM images having different colors on the same pattern are aligned and merged. The defects of the pattern are located by color difference in the merged SEM image. The defects of the pattern are firstly located at the location of the defects. A design in which a layout of the pattern is drawn, and the merged SEM image are aligned. The defects of the pattern are secondly classified by comparing the layout of the pattern drawn in the design and the merged SEM image. A type of the defects of the pattern is determined by combination of the first and second classifications of the defects of the pattern.