The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Apr. 14, 2020
National Institute for Materials Science, Ibaraki, JP;
Genki Yoshikawa, Ibaraki, JP;
Kota Shiba, Ibaraki, JP;
NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Ibaraki, JP;
Abstract
The present invention provides a nanomechanical sensor unsusceptible to water vapor, due to very low sensitivity to water vapor, that may interfere with measurement. In an embodiment of the present invention, as a sensitive film material of a nanomechanical sensor such as a surface stress sensor, poly(2,6-diphenyl-p-phenylene oxide) is utilized that is used for adsorption/concentration of a substance present in a trace amount in water or air, and represented by Formula (1) wherein n represents an integer of 1 or more. As can be seen from graphs showing changes over time of response signals in a case where a gas to be measured containing acetone, ethanol, and the like and nitrogen are alternately supplied to the surface stress sensor cyclically, it was confirmed that in the sensitive film of the present invention, adsorption/desorption of the components in the gas to be measured significantly occurs in response to the cyclic change, but the sensitivity to water is very low.