The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2026

Filed:

Aug. 31, 2021
Applicant:

Vida Products, Rohnert Park, CA (US);

Inventors:

Allen Sweet, Alameda, CA (US);

Szu-Fan Wang, El Cerrito, CA (US);

Kai Chorazewicz, Simi Valley, CA (US);

Assignee:

VIDA PRODUCTS, Rohnert Park, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/28 (2006.01); C30B 1/02 (2006.01); H01F 41/28 (2006.01); H01F 41/30 (2006.01);
U.S. Cl.
CPC ...
C30B 1/023 (2013.01); C30B 29/28 (2013.01); H01F 41/28 (2013.01); H01F 41/301 (2013.01);
Abstract

A MOD YIG epitaxial process for fabricating YIG nanofilms which, when deposited on GGG substrates, have single crystal epitaxial properties. The films may have thicknesses of 50 nm for a single layer, 100 nm for two layers, and 130 nm for three layers, and have a gyromagnetic ratio of 2.80 MHz per Oe, Gilbert damping ranges from 0.0003 to 0.001, 4πM$ values between 1650 G to 1780 G, coercivity from 1 Oe. to 5 Oe, and surface roughness of RMS 0.20 nm for up to 10 layers. Fabrication is economical and uses only a spinner, a drying station (RT to 150 C temperature control), and a quartz tube furnace that accommodates a flowing atmosphere of research grade oxygen, thereby eliminating the need for high vacuum deposition chambers.


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