The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2026

Filed:

Jan. 06, 2025
Applicant:

The Methodist Hospital, Houston, TX (US);

Inventor:

Xuewu Liu, Sugar Land, TX (US);

Assignee:

The Methodist Hospital, Houston, TX (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C25F 3/12 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
C25F 3/12 (2013.01); B81C 1/00119 (2013.01); B81C 1/00531 (2013.01);
Abstract

The present disclosure provides methods of manufacturing porous silicon structures having controlled sizes, shapes, and porosity by using a series of protective layers and selective etching steps. A benefit of the methods disclosed herein can be providing microfabrication and nanofabrication methods that are capable of provide porous silicon structures having sizes, shapes, and porosity that are more tightly controlled by avoiding inadvertently etching parts of the silicon structures during the fabrication process.


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