The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Oct. 10, 2022
Asm Ip Holding B.v., Almere, NL;
Shuyang Zhang, Chandler, AZ (US);
Jereld Lee Winkler, Gilbert, AZ (US);
Ankit Kimtee, Phoenix, AZ (US);
Eric James Shero, Phoenix, AZ (US);
Mimoh Kwatra, Gilbert, AZ (US);
Dinkar Nandwana, Chandler, AZ (US);
Todd Robert Dunn, Cave Creek, AZ (US);
Carl Louis White, Gilbert, AZ (US);
ASM IP Holding B.V., Almere, NL;
Abstract
Herein disclosed are systems and methods related to semiconductor processing device including a manifold including a bore configured to deliver a gas to a reaction chamber, the manifold including a first block mounted to a second block, the first and second mounted blocks cooperating to at least partially define the bore. The manifold may further comprise an insulator cap disposed about the first block or the second block. The semiconductor processing device may comprise at least three valve blocks mounted to the second block so that a precursor backflow is prevented. Heater rod(s) can extend through the second block to a location adjacent the first block.