The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 06, 2026

Filed:

Jun. 14, 2018
Applicant:

Tosoh Corporation, Shunan, JP;

Inventors:

Masami Mesuda, Ayase, JP;

Hideto Kuramochi, Ayase, JP;

Assignee:

TOSOH CORPORATION, Shunan, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C01B 21/06 (2006.01); C04B 35/58 (2006.01); C04B 35/626 (2006.01); C04B 35/64 (2006.01); C22C 29/16 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C01B 21/0632 (2013.01); C04B 35/58 (2013.01); C04B 35/62605 (2013.01); C04B 35/62695 (2013.01); C04B 35/64 (2013.01); C22C 29/16 (2013.01); C23C 14/3414 (2013.01); H01J 37/3426 (2013.01); C01P 2004/32 (2013.01); C01P 2004/51 (2013.01); C01P 2004/61 (2013.01); C01P 2006/80 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/465 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/5463 (2013.01); C04B 2235/549 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/6586 (2013.01); C04B 2235/662 (2013.01); C04B 2235/723 (2013.01);
Abstract

Provided are gallium nitride particles that have a low oxygen content and a high moldability and allow a gallium nitride sputtering target having a high density and a high strength to be produced. By causing a mixed powder of gallium oxide and gallium nitride to react at a temperature of 1000-1100° C. such that an ammonia reaction amount per hour is 1 or more times (by mole) an amount of gallium charged, gallium nitride particles are obtained of which an oxygen content is 1 atm % or less, an average particle size of primary particles is 5 μm or more, and a particle size of a range of 10 area % from smallest particles of a particle size distribution (10% particle size) is 3 μm or less.


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