The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2025
Filed:
Oct. 20, 2022
Toshiba Mitsubishi-electric Industrial Systems Corporation, Tokyo, JP;
Ren Arita, Tokyo, JP;
TMEIC CORPORATION, Tokyo, JP;
Abstract
In an electrode unit of an active gas generation apparatus according to the present disclosure, a dielectric film support member includes a support surface supporting a high voltage side dielectric film from a lower side. A lower surface of the dielectric film suppression member provided on an upper side of a ground side dielectric film includes a dielectric contact region overlapped with a peripheral region of the high voltage side dielectric film and the support surface of the dielectric film support member in a plan view and a dielectric non-contact region overlapped with an intermediate region of the high voltage side dielectric film in a plan view. The high voltage side dielectric film is suppressed from the dielectric contact region on an upper side by the dielectric film suppression member receiving suppress strength of a plurality of suppression auxiliary members.